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Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). Useful as a professional reference, technology user's guide, and as a textbook.
Contents
- Preface
- MEMS/MOEMS Technology Capabilities and Trends
- Operation and Design of MEMS/MOEMS Devices
- Optical Microsystem Modeling and Simulation
- The Digital Micromirror Device: A Micro-Optical Electromechanical Device for Display Applications
- Optical Waveguides and Silicon-Based Micromachined Architectures
- Silicon Micromachines in Optical Communications Networks: Tiny Machines for Large Systems
- Assembly and Test for MEMS and Optical MEMS
- MEMS, Microsystems, Micromachines: Commercializing an Emergent Disruptive Technology
- Index
- Sales Rank: #4204436 in Books
- Brand: Brand: SPIE Publications
- Published on: 2000-12-01
- Original language: English
- Number of items: 1
- Dimensions: 10.00" h x 7.25" w x 1.50" l, 2.35 pounds
- Binding: Hardcover
- 528 pages
- Used Book in Good Condition
Most helpful customer reviews
4 of 4 people found the following review helpful.
A good book which covers recent technology in MEMs
By OZGUR YAVUZCETIN
I had bought this book for one of my friends. He was an electrical engineer and I am a physicist. Normally because of the point of view of physicists and engineers, it is difficult to find a common expression in equations, derivations in these kind of books which can be understood by both majors. But this book is quite good for both. The expressions are clear and the reader can quickly have a good and strong concept about the chapters that are covered.
Thanks to the writer !
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